Limitations of precision length measurements based on interferometers
نویسندگان
چکیده
منابع مشابه
Limitations of Precision Length Measurements Based on Interferometers
− The most important principles, the basis and operation of heterodyne and homodyne interferometers are discussed. Their benefits and limitations are covered based on a metrological analysis. The resolution of interferometers can be determined by calculating the smallest resolvable distance increment. Also, it is shown here how the Abbe comparator principle can be fulfilled in all three measuri...
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ژورنال
عنوان ژورنال: Measurement
سال: 2010
ISSN: 0263-2241
DOI: 10.1016/j.measurement.2009.12.030